𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Heterogeneous integration of vaporliquidsolid grown silicon microprobe arrays/(111) and MOSFETs/(100) using a silicon on insulator substrate

✍ Scribed by Okugawa, Akihiro; Mayumi, Kotaro; Kawano, Takeshi; Ishida, Makoto

Book ID: 121323135
Publisher: IEEE
Year: 2010
Weight: 608 KB
Category: Article
ISBN: 1424457610
DOI: 10.1109/MEMSYS.2010.5442489

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Parylene stiction

✍ Yu, Feiqiao; Lin, Jeffrey Chun-Hui; Chen, Po-Jui; Tai, Yu-Chong 📂 Article 📅 2010 🏛 IEEE ⚖ 603 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Electrostatically driven micro-hydraulic actuator arrays

✍ Sadeghi, Mahdi; Kim, Hanseup; Najafi, Khalil 📂 Article 📅 2010 🏛 IEEE ⚖ 860 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Navigation grade MEMS accelerometer

✍ Zwahlen, Pascal; Nguyen, Anne-Marie; Dong, Yufeng; Rudolf, Felix; Pastre, Marc; 📂 Article 📅 2010 🏛 IEEE ⚖ 369 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Silicon monolithic acousto-optic modulator

✍ Sridaran, Suresh; Bhave, Sun 📂 Article 📅 2010 🏛 IEEE ⚖ 469 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Ferro-paper actuators

✍ Ding, Zhenwen; Wei, Pinghung; Ziaie, Babak 📂 Article 📅 2010 🏛 IEEE ⚖ 972 KB

[IEEE 2010 IEEE 23rd International Confe

[IEEE 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - Wanchai, Hong Kong, China (2010.01.24-2010.01.28)] 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) - A new capacitive type MEMS microphone

✍ Leinenbach, Christina; van Teeffelen, Kathrin; Laermer, Franz; Seidel, Helmut 📂 Article 📅 2010 🏛 IEEE ⚖ 540 KB