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A thin film polyimide based capacitive type relative humidity sensor

✍ Scribed by Takaaki Kuroiwa; Tomohito Hayashi; Akihiko Ito; Masanobu Matsuguchi; Yoshihiko Sadaoka; Yoshiro Sakai

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
242 KB
Volume
13
Category
Article
ISSN
0925-4005

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