𝔖 Bobbio Scriptorium
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A thick film hybrid IC amplifier for industrial use


Book ID
108362139
Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
130 KB
Volume
22
Category
Article
ISSN
0026-2714

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Evaluation of a Chip-Based Thin-Film / T
✍ Michaelβ€…J. SchΓΆning; Anette Simonis; Thomas Krings; Hans LΓΌth; Joseph Wang πŸ“‚ Article πŸ“… 2002 πŸ› John Wiley and Sons 🌐 English βš– 424 KB πŸ‘ 2 views

Both a pH-sensitive thin-film sensor and a thick-film reference electrode have been integrated into a hybrid sensor module that is suitable for (bio-)chemical analysis in aqueous solutions. The pH-sensitive thin-film sensor consists of a capacitive layer structure of Al/p-Si/SiO 2 /Al 2 O 3 and is p