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A thermopneumatic micropump based on micro-engineering techniques

✍ Scribed by F.C.M. Van de Pol; H.T.G. Van Lintel; M. Elwenspoek; J.H.J. Fluitman

Book ID: 108028012
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 438 KB
Volume: 21
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)85038-6

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