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A microfluidic flow-converter based on a double-chamber planar micropump

✍ Scribed by Chia-Jui Hsu; Horn-Jiunn Sheen

Book ID
106330593
Publisher
Springer-Verlag
Year
2008
Tongue
English
Weight
796 KB
Volume
6
Category
Article
ISSN
1613-4982

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## Abstract This work concerns the fabrication, modeling and characterization of a novel microfluidic flow sensor based on a microchannel capped with a porous silicon membrane, on top of which the sensor active elements are integrated. The microchannel is formed through a two‐step anodization proce