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A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates

✍ Scribed by Y. Travaiy; J. Schuhmacher; M. R. Baklanov; S. Giangrandi; O. Richard; B. Brijs; M. Van Hove; K. Maex; T. Abell; K. R. F. Somers; M. F. A. Hendrickx; L. G. Vanquickenborne; A. Ceulemans; A. M. Jonas

Book ID
126681377
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
706 KB
Volume
98
Category
Article
ISSN
0021-8979

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