Low-energy noble-gas ion scattering (LEIS) probes the outermost atomic layer of a material, but a quantitative compositional analysis of this layer is not straightforward. It is demonstrated that quantiΓcation by calibration can be done, assuming that ion fractions and shielding e β ects are the same
β¦ LIBER β¦
A telescope counter detection system applied to low-energy ion-beam surface analysis
β Scribed by Jean-Paul Thomas; Jean Engerran; Alain Cachard; Jacques Tardy
- Publisher
- Elsevier Science
- Year
- 1974
- Weight
- 506 KB
- Volume
- 119
- Category
- Article
- ISSN
- 0029-554X
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