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A systems tester for compact HPG component development

✍ Scribed by Walls, W.; Vaughn, M.

Book ID
114647021
Publisher
IEEE
Year
1984
Tongue
English
Weight
886 KB
Volume
20
Category
Article
ISSN
0018-9464

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The increasing complexity of VLSI components requires the use of more powerful tools to verify them. One of these tools, the electron beam tester can bring a new powerful help in various ways during the life of an integrated circuit. The purpose of this paper is to present briefly CAMECA works abou