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A study of the parameters influencing the microstructure of thick La2Zr2O7 films

✍ Scribed by V. Cloet; P. Lommens; R. Hühne; K. De Buysser; S. Hoste; I. Van Driessche


Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
896 KB
Volume
325
Category
Article
ISSN
0022-0248

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✦ Synopsis


Thick La 2 Zr 2 O 7 (LZO) layers were produced via a water-based sol-gel route. All layers were analyzed indepth by XRD, pole figures and transmission electron microscopy. Well-textured thick layers (120 nm) could be obtained by adjusting the heat treatment and introducing a LZO seed layer (20 nm). The overall quality of the LZO layers greatly improved by the introduction of seed layers. Nevertheless, nanovoids were found in the thick LZO layers. A tentative explanation for parameters influencing the origin and development of the nanovoids is presented, based on TEM observations.


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