A study of the Growth-Temperature-dependent Surface Morphology in InSb Liquid Phase Epitaxy
โ Scribed by L. B. Chang
- Publisher
- John Wiley and Sons
- Year
- 1991
- Tongue
- English
- Weight
- 327 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0232-1300
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โฆ Synopsis
InSb LPE layers were grown on (1 11) InSb substrates, their phase diagram and growth rates studied. The InSb activity coefficient a(T), determined by fitting the experimental data, had a value of 2556-11.11 . T cal . mole-'. The terraces on the surface were reduced by increasing the temperature to 350 "C. Hall measurements of InSb/CdTe heterostructure failed due to the high Te segregation. The carrier concentration of these InSb epilayers, however, was determined by C-V measurements with values between 7.5. l O I 4 and 5 . 10'' ~m -~.
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