Electrical characteristics of In/ITO p-t
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Joon-Ho Oh; Kyoung-Kook Kim; Hyun-Gi Hong; Kyeong-Jae Byeon; Heon Lee; Sang-Won
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Article
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2010
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Elsevier Science
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English
โ 573 KB
We have investigated the annealing-induced improved electrical properties of In(10 nm)/ ITO(200 nm) contacts with p-type GaN. The contacts become ohmic with a specific contact resistance of 2.75 ร 10 -3 O cm 2 upon annealing at 650