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A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist

✍ Scribed by A. N. Gentselev; B. G. Gol’denberg; E. V. Petrova; V. F. Pindyurin; A. S. Kozlov

Book ID: 110203515
Publisher: Pleiades Publishing
Year: 2012
Tongue: English
Weight: 459 KB
Volume: 6
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451012010089

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