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A study of the charging phenomena during electron irradiation of sintered Si3N4

โœ Scribed by Hansheng Guo; W Maus-Friedrichs; V Kempter; Jiaxin Shi


Book ID
114164377
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
144 KB
Volume
173
Category
Article
ISSN
0168-583X

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Swelling and optical properties of Si3N4
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Silicon nitride layers of 140 nm thickness were deposited on silicon wafers by low pressure chemical vapour deposition (LPCVD) and irradiated at GANIL with Pb ions of 110 MeV up to a maximum fluence of 4 ร‚ 10 13 cm ร€2 . As shown in a previous work these irradiation conditions, characterized by a pre