A study of growth defects in seeded and unseeded silicon on insulator layers
β Scribed by D.A. Williams; R.A. McMahon; H. Ahmed
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 890 KB
- Volume
- 4
- Category
- Article
- ISSN
- 0921-5107
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