X-ray Photoelectron Spectroscopy Depth P
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Butcher, K. S. A.; Tansley, T. L.; Li, Xin
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Article
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1997
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John Wiley and Sons
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English
โ 359 KB
๐ 2 views
Aluminium nitride thin รlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e โ ect of 5 kV argon ion milling used to remove the hydrolysis layer w