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A structural study of amorphous aluminium phosphate thin films by X-ray absorption spectroscopy

โœ Scribed by S. Daviero; A. Ibanez; C. Avinens; A.M. Flank; E. Philippot


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
798 KB
Volume
226
Category
Article
ISSN
0040-6090

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Aluminium nitride thin รlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e โ€ ect of 5 kV argon ion milling used to remove the hydrolysis layer w