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A strong reduction in the density of near-interface traps at the SiO[sub 2]â4H-SiC interface by sodium enhanced oxidation

✍ Scribed by Allerstam, F.; OÌlafsson, H. OÌ.; GudjoÌnsson, G.; Dochev, D.; SveinbjoÌrnsson, E. OÌ.; RoÌdle, T.; Jos, R.

Book ID: 120520637
Publisher: American Institute of Physics
Year: 2007
Tongue: English
Weight: 341 KB
Volume: 101
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2745321

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A strong reduction in the density of near-interface traps at the SiO[sub 2]â4H-SiC interface by sodium enhanced oxidation

A strong reduction in the density of near-interface traps at the SiO[sub 2]â4H-SiC interface by sodium enhanced oxidation