A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges

✍ Scribed by Sandmaier, H.; Kuhl, K.

• Book ID: 114535609
• Publisher: IEEE
• Year: 1993
• Tongue: English
• Weight: 527 KB
• Volume: 40
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.277331