Simulation of circular silicon pressure sensors with a center boss for very low pressure measurement

✍ Scribed by Yasukawa, A.; Shimazoe, M.; Matsuoka, Y.

• Book ID: 114535836
• Publisher: IEEE
• Year: 1989
• Tongue: English
• Weight: 625 KB
• Volume: 36
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.30935