A SIMS study of ion-assisted etching mechanisms; adsorbed fluorine on Si removed by ion bombardment

✍ Scribed by E.-A. Knabbe; J.W. Coburn; E. Kay

• Book ID: 118984409
• Publisher: Elsevier Science
• Year: 1982
• Tongue: English
• Weight: 842 KB
• Volume: 123
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(82)90338-7