✦ LIBER ✦
A sims study of ion-assisted etching mechanisms; adsorbed fluorine on Si removed by ion bombardment
✍ Scribed by E.-A. Knabbe; J.W. Coburn; E. Kay
- Publisher
- Elsevier Science
- Year
- 1982
- Weight
- 52 KB
- Volume
- 123
- Category
- Article
- ISSN
- 0167-2584
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