A preparational method was developed solving the problem of cross-sectional TEM preparation of thin films and layer systems deposited onto water-soluble substrates. The technique is based on the replacement of the sample onto steady substrate, followed by mechanical and ion beam thinning. Cross-sect
A simple, quick and reliable method for TEM cross-section preparation of ceramic oxide films on thin metal substrates
✍ Scribed by D. Eyidi; O. Eibl
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 435 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0968-4328
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✦ Synopsis
We present a preparation method of cross-sectional thin foils for transmission electron microscopy (TEM). Samples are 0.1±1 mm thick ceramic oxide ®lms (CeO 2 , CeO 2 ±YBa 2 Cu 3 O 7 and CeO 2 ±ZrO 2 /YO 2 ±YBa 2 Cu 3 O 7 ) epitaxially grown on 30±100 mm highly textured nickel substrates. This method includes gluing the sample between a copper oxide dummy and a silicon dummy, followed by mechanical polishing and conventional ion milling. TEM cross-sectional samples obtained with this selection of dummies are electron-transparent up to a few tens of mm parallel to the ®lm surface. Several layer structures were analyzed by TEM and the results are shown. The preparation technique described here can be applied to any type of oxide ®lm deposited on thin metal substrates.
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