A self-DLC coated cathode plasma source

✍ Scribed by A. Deachana; D. Boonyawan; B. Yodsombat

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 540 KB
• Volume: 203
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2009.02.132

✦ Synopsis

A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathode for plasma density enhancement were investigated. DLC-Al cathodes coating by self cathode of microwave plasma source were fabricated to control and yielded strong non-activated emission. The novel cathodes showed enhancement of current density up to 240%. In addition, the contamination in the plasma source could be avoided with the new cathodes.