A self-DLC coated cathode plasma source
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A. Deachana; D. Boonyawan; B. Yodsombat
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Article
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2009
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Elsevier Science
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English
⚖ 540 KB
A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathod