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A plasma source with a combined cathode

✍ Scribed by R. Ya. Zakharkin; A. N. Kolesnichenko; É. I. Molodykh; A. V. Pustogarov


Publisher
Springer US
Year
1971
Tongue
English
Weight
532 KB
Volume
21
Category
Article
ISSN
1573-871X

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A self-DLC coated cathode plasma source
✍ A. Deachana; D. Boonyawan; B. Yodsombat 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 540 KB

A novel self-microwave plasma source modified by diamond-like carbon (DLC) coating self-cathode for density enhancement was devised. This simple method had been once routed for enhanced efficient microwave plasma with very low-cost. The coating parameters in fabrication of the self-coated DLC cathod