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A self comparison method to measure distortions of fine gratings and to characterize electron beam systems

✍ Scribed by Hans W.P. Koops; Yuli Vladimirsky; Michael Rüb; Rainer Erb

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 400 KB
Volume: 9
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(89)90098-1

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