✦ LIBER ✦
Evaluation of Moiré patterns obtained by the “self-comparison-method” to characterize particle beam lithography systems
✍ Scribed by H.W.P. Koops; H. Oki; W. Betz; H.J. Huen; R. Zengerle
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 467 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0167-9317
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