A saddle field ion source of spherical configuration for etching and thinning applications : J. Franks and A. M. Ghander. Vacuum 24, 489 (1974)

• Publisher: Elsevier Science
• Year: 1975
• Tongue: English
• Weight: 124 KB
• Volume: 14
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(75)90286-3