๐”– Bobbio Scriptorium
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A review of sample backside preparation techniques for VLSI

โœ Scribed by P. Perdu; R. Desplats; F. Beaudoin


Book ID
108361773
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
595 KB
Volume
40
Category
Article
ISSN
0026-2714

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โœ Madden, Michael C. ;Crafard, Penny ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Wiley (John Wiley & Sons) ๐ŸŒ English โš– 593 KB

Sample preparation for VLSI analysis is often slow due to long ion milling time and because the location of the thin area of the sample is difficult to control. By modifying the standard techniques used with a VCR Group (and perhaps other) mechanical dimpler, the ion milling time can be reduced to l