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A regression method for determining epitaxial film thickness

✍ Scribed by V. K. Grigor'ev; V. I. Petrovskii; T. A. Fedunina

Book ID: 104959844
Publisher: Springer US
Year: 1981
Tongue: English
Weight: 352 KB
Volume: 24
Category: Article
ISSN: 0543-1972
DOI: 10.1007/bf00828708

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