A reduced reaction mechanism for diamond deposition modeling

✍ Scribed by C. Wolden; K.K. Gleason; J.B. Howard

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 371 KB
• Volume: 96
• Category: Article
• ISSN: 0010-2180
• DOI: 10.1016/0010-2180(94)90159-7

✦ Synopsis

A brute force sensitivity analysis was used to identify the key gas-phase reactions and species in conditions typical of hot-filament diamond reactors. The model reduction is accomplished by comparing the concentrations of important species (H, CH3, and C2H 2) with values calculated using "full" mechanisms in an idealized hot-filament environment. Two proposed mechanisms, containing 24 and 89 reactions, were both reduced to an identical simplified model consisting of 9 species and 9 elementary reactions. Some of these reactions may be grouped into two net reactions, further reducing the mechanism to six species and six reactions. The reduced number of species and reactions will significantly reduce the computational requirements of two-and three-dimensional simulations.