A Raman spectrophotometric investigation of the phases formed during the cobalt silicidation by rapid thermal anneal

✍ Scribed by Gurmeet S. Shergill; Chih-Shih Wei; J. Neal Cox; Dave B. Fraser; Jeff J. Murray

• Book ID: 104592271
• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: English
• Weight: 352 KB
• Volume: 14
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740140118