A radio frequency dielectric sputtering system with non-grounded electrodes : L. Hollandet al., J. Sci. Instrum. (J. Phys. E.), Ser. 2, 1 (1) (1968), p. 32

• Publisher: Elsevier Science
• Year: 1969
• Tongue: English
• Weight: 198 KB
• Volume: 8
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(69)90180-2