863. A radio frequency dielectric sputtering systems with non-grounded electrodes: L Holland et al, J sci instrum, (J phys E), ser 2, 1 (1), 1968, 32–34.

• Publisher: Elsevier Science
• Year: 1968
• Tongue: English
• Weight: 177 KB
• Volume: 18
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(68)92201-x