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A proton backscattering study of titanium nitride films deposited on a stainless steel substrate by RF sputtering

✍ Scribed by Koki Tanaka; Yuji Kubo; Neil B. Chilton; Masao Kumagai

Book ID: 113284462
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 668 KB
Volume: 83
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95882-6

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