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A Protocol for the Verification of Acid Generation in 157 nm Lithography

✍ Scribed by Scaiano, J. C.; Laferriere, Marie; Ivan, Marius G.; Taylor, Gary N.

Book ID: 121864763
Publisher: American Chemical Society
Year: 2003
Tongue: English
Weight: 171 KB
Volume: 36
Category: Article
ISSN: 0024-9297
DOI: 10.1021/ma034397d

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