✦ LIBER ✦
Challenges in using optical lithography for the building of a 22 nm node 6T-SRAM cell
✍ Scribed by M. Ercken; E. Altamirano-Sanchez; C. Baerts; S. Brus; J. De Backer; C. Delvaux; M. Demand; N. Horiguchi; S. Locorotondo; T. Vandeweyer; A. Veloso; S. Verhaegen
- Book ID
- 104052570
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 624 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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