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A precipitate coarsening mechanism for buried layer formation by ion implantation

✍ Scribed by D.W. Brown; Z.A. Munir; R.G. Musket


Book ID
113281611
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
692 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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