𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A porous silicon based particle filter for microsystems

✍ Scribed by Wallner, J. Z. ;Bergstrom, P. L.

Book ID
105364222
Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
260 KB
Volume
204
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

A porous silicon (PS) based particle filter has been fabricated and tested for integrated microsystems. By engineering the morphology of the porous silicon membrane, depth filtration with high collection efficiency in the submicron range (0.3∼1 μm), low pressure‐drop, and large filtration capacity (0.5 mg/cm^2^) has been demonstrated. With the PS particle filter, on‐board gas filtration can be achieved. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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