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A polysilicon-on-oxide (POSOX) isolation structure for bipolar integrated circuits

✍ Scribed by Chung-Len Lee; Tan Fu Lei; Neng-Wei Wu; Rey-Bin Tang

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 598 KB
Volume: 30
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(87)90010-4

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