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A percolation approach to ion beam induced modifications of organic resists

✍ Scribed by J. Davenas; X.L. Xu; C. Khodr; M. Treilleux; G. Steffan


Book ID
113277137
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
375 KB
Volume
7-8
Category
Article
ISSN
0168-583X

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