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A numerical method for the efficient atomistic simulation of the plasma-etch of nano-patterned structures

✍ Scribed by L. Chiaramonte; R. Colombo; G. Fazio; G. Garozzo; A. La Magna


Book ID
116376137
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
811 KB
Volume
54
Category
Article
ISSN
0927-0256

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