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A novel technique for the fabrication of sub-20nm metallic wires

✍ Scribed by A.C.F. Hoole; A.N. Broers

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 1004 KB
Volume: 30
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00289-8

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