✦ LIBER ✦
Comparative study of calixarene and HSQ resist systems for the fabrication of sub-20 nm MOSFET device demonstrators
✍ Scribed by J. Kretz; L. Dreeskornfeld; G. Ilicali; T. Lutz; W. Weber
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 275 KB
- Volume
- 78-79
- Category
- Article
- ISSN
- 0167-9317
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