A novel sputtering oxidation coupling (SOC) method to fabricate VO2 thin film

✍ Scribed by Xiaofeng Xu; Anyuan Yin; Xiliang Du; Jiqing Wang; Jiading Liu; Xinfeng He; Xingxing Liu; Yilong Huan

• Book ID: 103820032
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 242 KB
• Volume: 256
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2009.11.022