A novel reactive magnetron sputtering technique for producing insulating oxides of metal alloys and other compound thin films

✍ Scribed by I. Safi

• Book ID: 108422815
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 344 KB
• Volume: 135
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(00)00985-3