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A novel PLD configuration for deposition of films of improved quality: a case study of carbon nitride

✍ Scribed by T. Szörényi; B. Hopp; Z. Geretovszky


Book ID
106019380
Publisher
Springer
Year
2004
Tongue
English
Weight
218 KB
Volume
79
Category
Article
ISSN
1432-0630

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