A coupling RF MEMS power sensor based on
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Zhiqiang Zhang; Xiaoping Liao; Lei Han
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Article
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2010
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Elsevier Science
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English
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A wideband 8-12 GHz inline RF MEMS power sensor that is based on sensing a certain percentage of the incident microwave power coupled by a MEMS membrane is presented, and the sensor is accomplished with GaAs MMIC technology. In order to improve microwave characteristics and the frequency response of