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A novel bonding technology for GaAs sensors

โœ Scribed by Qing-An Huang; Shi-Ji Lu; Qin-Yi Tong


Book ID
103957306
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
362 KB
Volume
21
Category
Article
ISSN
0924-4247

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A coupling RF MEMS power sensor based on
โœ Zhiqiang Zhang; Xiaoping Liao; Lei Han ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 1022 KB

A wideband 8-12 GHz inline RF MEMS power sensor that is based on sensing a certain percentage of the incident microwave power coupled by a MEMS membrane is presented, and the sensor is accomplished with GaAs MMIC technology. In order to improve microwave characteristics and the frequency response of