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A non-polar thin-film titanium oxide capacitor

✍ Scribed by P. Lloyd


Publisher
Elsevier Science
Year
1968
Tongue
English
Weight
104 KB
Volume
7
Category
Article
ISSN
0026-2714

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Thin films of several thicknesses in the form of MIM structures are prepared from the powders of tin oxide (SnO,) by thermal evaporation technique in a vacuum of Torr. The dielectric properties of tin oxide film capacitors have been studied with temperatures varying from 77 to 400 K and also with fr