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A new technique for the measurement of multicomponent gas transport through polymeric films

โœ Scribed by O'Brien, K.C.; Koros, W.J.; Barbari, T.A.; Sanders, E.S.


Book ID
122078031
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
636 KB
Volume
29
Category
Article
ISSN
0376-7388

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Polymer thin films are widely used as coatings and interlevel dielectrics in microelectronic applications. In thin-film structures, stresses are generated due to interaction with adjacent layers and film shrinkage due to solvent evaporation or curing. This causes polymer chain orientation resulting