𝔖 Bobbio Scriptorium
✦   LIBER   ✦

A new technique for the fabrication of thin silicon radiation detectors

✍ Scribed by Foulon, F.; Rousseau, L.; Babadjian, L.; Spirkovitch, S.; Brambilla, A.; Bergonzo, P.

Book ID
121363381
Publisher
IEEE
Year
1999
Tongue
English
Weight
406 KB
Volume
46
Category
Article
ISSN
0018-9499

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Epitaxy β€” a new technology for fabricati
Epitaxy β€” a new technology for fabrication of advanced silicon radiation detectors
✍ J. Kemmer; F. Wiest; A. Pahlke; O. Boslau; P. Goldstrass; T. Eggert; M. Schindle πŸ“‚ Article πŸ“… 2005 πŸ› Elsevier Science 🌐 English βš– 389 KB

Twenty five years after the introduction of the planar process to the fabrication of silicon radiation detectors a new technology, which replaces the ion implantation doping by silicon epitaxy is presented. The power of this new technique is demonstrated by fabrication of silicon drift detectors (SD