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A new system for vacuum deposition of refractory materials using an atmospheric-pressure inductively coupled plasma

✍ Scribed by Merkle, B. D.; Kniseley, R. N.; Schmidt, F. A.


Book ID
121343751
Publisher
American Institute of Physics
Year
1987
Tongue
English
Weight
722 KB
Volume
62
Category
Article
ISSN
0021-8979

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